MXS Calibration Standard 301CE for SEM Mounted, 300 nm Spacing, Each

Details

EMS offers a series of calibration standards with one and two dimension calibrated patterns. These standards are created utilizing holographic interference of a particular laser frequency. They are typically accurate to <1% across the entire surface of the standard. These reference standards are remarkably durable under typical operating conditions. The surface contamination behavior is also very good. There are no better sub-micron reference standard available in this price range. 300 nanometers grid spacing of parallel ridges of W-coated Photoresist on Si. For SEM